Development of Multiple-Wavelength Laser Diodes for BD/DVD/CD Compatibility

Abstract

We developed a wafer-level integration process for multiple-wavelength laser diodes. This integration process allows highly accurate and proximal alignment of emission spots, as well as high mass-productivity. Using this process, we fabricated blue/red and red/infrared two-wavelength laser diodes. In these laser diodes, the distance between two emission spots was approximately 3 um. Furthermore we fabricated blue/red/infrared three-wavelength laser diode whose emission spots were aligned within 10 um distance. Such a short spot distance allows the optical components of the pickup to be substantially simplified. Key Words: Blu-ray disc, Two wavelength, Three wavelength,.Laser lift-off, Wafer-level integration 1.•@ ‚Í ‚ ¶ ‚ß ‚É '¼ OEa12cm‚Ì OEõ ƒf ƒB ƒX ƒN ‚Í,1982"N,‚Ü ‚¸Žn‚¸Žn ‚ß ‚ÉCom-pact Disc(CD)‚ª "o •ê ‚µ ‚½. CD‚Å ‚ÍPCMOE`‚ÍPCMOE`Ž® ‚Ì ‰¹ •º ƒf •[ ƒ^ ‚ð-ñ74•ª ŠÔ Šy ‚µ ‚Þ ‚± ‚AE ‚ª ‚Å ‚«,‚» ‚ê ‚Ü ‚Å ‚Ì ƒA ƒi ƒ• ƒO ƒf ƒB ƒX ƒN ƒOE ƒR •[ ƒh ‚AE"ä ‚× ‚Ä •Ä • ¶ ƒm ƒC ƒY ‚ª ‚Ù ‚AE ‚ñ ‚Ç-³ ‚-,OEJ ‚è •Ô ‚µ•Ä • ¶ ‚É ‚à ‹-‚¢ "_ ‚â,•‚ '¬ ƒA ƒN ƒZ ƒX •« ‚È ‚Ç ‚ª •] ‰¿ ‚³ ‚ê,•u ‚-ŠÔ ‚Ɉê‚Ɉê "Ê ‰AE 'ë ‚Ö ‚AE "ü ‚è•ž ‚ñ ‚Å •s ‚Á ‚½.‚» ‚Ì OEã,-L ‹@ •F 'f OEn •Þ-¿ ‚ð-p ‚¢ ‚½CD-R,'Š •Ï ‰» "} 'Ì ‚ð-p ‚¢ ‚½CD-RW‚È ‚Ç ‚Ì ' ‡ ŠÔ ‚ð '• ‚â ‚µ,ƒI •[ ƒf ƒB ƒI-p ‚Ì ‚Ý ‚È ‚炸ƒf‚炸ƒf •[ ƒ^ •Û ' ¶-p ‚AE ‚µ ‚Ä ‚à"š "-"I ‚É •• ‹y ‚µ ‚½.CD‚Í "g '·780 nm‚Ì •Ô ŠO ƒOE •[ ƒU •[ OEõ ‚ð-p ‚¢ ‚Ä650•`700MB‚Ì ‹L˜^‹L˜^-e-Ê ‚ð ŽÀ OE» ‚µ ‚Ä ‚¢ ‚é ‚ª,Žž 'ã ‚Í •‚ "x •î •ñ ‰» ŽÐ ‰ï ‚Ö ‚AE "Ë "ü ‚µ,•X ‚È ‚é •‚-§ "x ‹L˜^‹L˜^ ‚ª-v ‹• ‚³ ‚ê ‚é ‚ae ‚¤ ‚É ‚È ‚Á ‚½.‹L˜^‹L˜^-§ "x ‚Í OEõ ‚Ì •W '© ƒX ƒ| ƒb ƒgOEa ‚Ì Ž© •ae ‚É "½ "ä-á ‚· ‚é ‚ª,-Ç ‚-'m ‚ç ‚ê ‚Ä ‚¢ ‚é ‚ae ‚¤ ‚É •W '© ƒX ƒ| ƒb ƒgOEad‚Í ŽŸ Ž® ‚Ì ‚ae ‚¤ ‚É ƒOE •[ ƒU •[ OEõ ‚Ì "g '· ƒÉ ‚É"ä-á ‚· ‚é. (1) ‚± ‚± ‚Å,NA: ŠJ OEû •",ƒÈ:0.96(ˆê-l "ü ŽË,1/e2)‚Å ‚ ‚é. ‚± ‚Ì ‚½ ‚ß,‹L˜^‹L˜^-§ "x ‚ð •ã ‚° ‚é ‚½ ‚ß ‚É,ƒOE •[ ƒU •[ OEõ ‚Ì "g '· ‚ð 'Z ‚-‚· ‚é •û OEü ‚Å ‚Ì ƒV ƒX ƒe ƒ€ ŠJ "-‚ª •s ‚í ‚ê ‚½.1996"N ‚É "o •ê ‚µ ‚½Digital Versatile Disk(DVD)‚Í "g '·650nm‚Ì •Ô •F ƒOE •[ ƒU •[ OEõ ‚ð-p ‚¢ ‚Ä •Ð-Ê 'P 'w ‚Å4.7GB‚Ì ‹L˜^‹L˜^-§ "x ‚ð ŽÀ OE» ‚µ ‚Ä ‚¢ ‚é.DVD‚ÍMPEG2ƒR •[ ƒf ƒb ƒN •û Ž® ‚È ‚Ç ‚ð-p ‚¢ ‚Ä •" Žž ŠÔ ‚Ì ‰f 'oe ‚ð‹l ‚ß •ž ‚Þ ‚± ‚AE ‚ª ‚Å ‚« ‚é. ‚» ‚µ‚Ä OE» •Ý,"g '·405nm‚Ì •Â Ž ‡ •F ƒOE •[ ƒU •[ OEõ ‚ð-p ‚¢ ‚Ä •X ‚È ‚é •‚ ‹L˜^‹L˜^-§ "x ‚ðŽÀ OE» ‚µ ‚½ OEõ ƒf ƒB ƒX ƒN ƒV ƒX ƒe ƒ€ ‚ª •• ‹y ‚µ ‚ ‚¤ ‚AE ‚µ‚Ä ‚¢ ‚é.OE» •Ý,‚± ‚Ì •‚-§ "x OEõ ƒf ƒB ƒX ƒN ‚Ì ‹K Ši ‚ÍBlu-ray Disc‚AEHD-DVD‚Ì2‚ ‚ª ' ¶ •Ý ‚· ‚é ‚ª,‚Ç ‚¿ ‚ç ‚à"g '·405 nm‚Ì ƒOE •[ ƒU •[ OEõ ‚ð-p ‚¢ ‚Ä ‚¨‚肨‚è,'¼ OEa12cm‚ÌCDƒT ƒC ƒY •Ð-Ê ˆê 'w ‚Å20GB‚ð ‰z ‚¦ ‚é ‹L˜^‹L˜^-§ "x ‚Ì ŽÀ OE» ‚ª ‰Â "\ ‚Å ‚é1,2). ‚± ‚Ì ‚ae ‚¤ ‚È •‚-§ "x ‹L˜^‹L˜^ ‚Í,‚» ‚ê Ž©'Ì ‚Å •\ •ª ‚É-£-Í "I ‚È ‚à ‚Ì ‚Å ‚Í ‚ ‚é ‚à ‚Ì ‚Ì,Šù ' ¶ ‚Ì ‹K Ši ‚É Šî ‚à ‚-DVDƒt ƒ@ ƒ~ ƒŠ •[ (DVD-video,-R,-RW,-RAM"™)•X ‚É ‚ÍCDƒt ƒ@ ƒ~ ƒŠ •[ (CD,-R,-RW"™)‚Í,OE» •Ý Šù ‚É •L ‚-•• ‹y ‚µ‚Ä ‚¨‚肨‚è,‚± ‚ê ‚ç ‚AE‚Ì ƒR ƒ"ƒp ƒ` ƒr ƒŠ ƒe ƒB •[ ‚ð Ž• ‚½ ‚¹ ‚é ‚± ‚AE ‚Í OEõ ƒf ƒB ƒX ƒN '• 'u ‚AE ‚µ‚Ä •K •{ ‚AE ‚È ‚Á ‚Ä ‚-‚é ‚AE•l ‚¦ ‚ç ‚ê ‚é.‚µ ‚© ‚µ‚È ‚ª ‚ç, DVD, CD‚Ì Še "} 'Ì ‚Å ‚Ì ƒs ƒb ƒg•[ ‚³ ‚â-L ‹@ •F 'f •Þ-¿,'Š •Ï ‰» •Þ-¿ ‚Ì Š´"Š´"x "™ ‚ð•l-¶ ‚· ‚é ‚AE,"¯ ˆê ‚Ì "g '· ‚Å 'S ‚Ä ‚Ì "} 'Ì ‚ð "Ç ‚Ý •' ‚« ‚· ‚é ‚± ‚AE ‚Í "ï ‚µ ‚¢. ‚» ‚± ‚Å405nm'Ñ ƒOE •[ ƒU •[ ‚É ‰Á ‚¦ ‚Ä650 nm'Ñ ƒOE •[ ƒU •[, 780nm'Ñ ƒOE •[ ƒU •[ ‚ð "‹ •Ú ‚· ‚é ‚± ‚AE‚ª •K-v ‚AE ‚È ‚é.‚± ‚ê ‚É ‚Í,OE •Ê ‚É ƒp ƒb ƒP •[ ƒW ‚³ ‚ê ‚½2‚ ‚ ‚é ‚¢ ‚Í3‚ ‚Ì ƒOE •[ ƒU •[ ‚ð ƒs ƒb ƒN ƒA ƒb ƒv ‚É"‹ •Ú ‚µ,ƒv ƒŠƒY ƒ€ "™ ‚Å OEõ˜HOEõ˜H '² •® ‚· ‚é ‚± ‚AE‚ ŽÀ OE» ‚· ‚é ‚± ‚AE‚ª ‚Å ‚« ‚é ‚ª,•«-ˆ "I ‚É ƒV ƒX ƒe ƒ€ ‚ð OEy "-'Z •¬ ‰» ‚· ‚é ‚½ ‚ß ‚É,1ƒ` 1ƒ`ƒb ƒv ‚© ‚ç •¡ •" ‚Ì "g '· ‚Ì ƒOE •[ ƒU •[ OEõ ‚ª •o ŽË ‚³ ‚ê ‚é ‚ae ‚¤ ‚È '½ "g '· •W •Ï ƒOE •[ ƒU •[ ‚Ì ŽÀ OE» ‚ª-] ‚Ü ‚ê ‚Ä ‚¢ ‚é. OE» •Ý •¤ •i ‰» ‚³ ‚ê ‚Ä ‚¢ ‚éDVD/CDƒR ƒ"ƒp ƒ`-p ‚Ì650 nm/780 nm"ñ "g '· •W •Ï ƒOE •[ ƒU •[ ‚Ì •ê • ‡ ‚Å ‚Í,‚Ç ‚¿ ‚ç ‚Ì "g '· ‚Ì "¼ "± 'Ì ƒOE •[ ƒU •[ ‚àGaAsŠî " •ã ‚Ö ‚Ì •¬-OE ‚ª ‰Â "\ ‚Å ‚ ‚é ‚½ ‚ß ‚É, "¯ ˆê Šî " •ã ‚É ƒ‚ ƒm ƒŠ ƒV ƒb ƒN ‚É OE`OE`•¬ ‚· ‚é ‚AE ‚¢ ‚¤ Žè-@ ‚ª ‚AE ‚ç ‚ê 'ae35Šª 'ae2• †BD/DVD/CDOEÝ Š· ‹@-p '½ "g '· •W•Ï ƒOE•[ ƒU •[ ‚Ì ŠJ"-73