Journal Article

Gettering Technology for CMOS Image Sensors Using a Cluster Ion Implantation

  • KURITA K
  • KADONO T
  • OKUYAMA R
  • et al.
Hyomen Kagaku (2016) 37(3) 104-109
DOI: 10.1380/jsssj.37.104
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KURITA, K., KADONO, T., OKUYAMA, R., HIROSE, R., MASADA, A., OKUDA, H., & Yoshihiko, K. (2016). Gettering Technology for CMOS Image Sensors Using a Cluster Ion Implantation. Hyomen Kagaku, 37(3), 104–109. https://doi.org/10.1380/jsssj.37.104

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