Micro-XANES by EPMA spectrometer

Abstract

XANES (X-ray absorption near edge structure) spectrum of an area of a few tens of square micrometers of MgO is measured with an EPMA (electron probe X-ray microanalyzer) using a novel method - EXEFS (extended X-ray emission fine structure) method - proposed by the present authors. The EXEFS method has the following six remarkable characteristics: (1) high energy resolution, (2) high spatial resolution, (3) short measuring time, (4) easy sample preparation, (5) convenient without using synchrotron radiation facilities, and (6) good at measuring soft X-ray absorption spectra.