Customized silicon cantilevers for Casimir force experiments using focused ion beam milling

Abstract

Higher sensitivity cantilevers will lead to exploration of new phenomena in the Casimir effect. We have used focused ion beam milling to reduce the width of a commercial single crystal, rectangular-shaped silicon cantilevers with a massive Cr/Au-coated-hollow sphere attached at their free end. Theoretically these milled and modified cantilevers should have better Casimir force sensitivity than their non-milled counterparts. In this preliminary report however only 1 out of 4 modified cantilevers were found to have a higher force sensitivity. Future studies will be needed to determine the general applicability of focused ion beam milling for force sensitivity improvements in comparison to the complete nanofabrication of cantilevers. © 2009 IOP Publishing Ltd.