Journal Article

Now or Never. Plasma Based Ion Implantation for Three-Dimensional Surface Modification and Process. Three Dimensional Ion Implantation System

Journal of the Institute of Electrical Engineers of Japan (1998) 118(12) 744-747
DOI: 10.1541/ieejjournal.118.744
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Now or Never. Plasma Based Ion Implantation for Three-Dimensional Surface Modification and Process. Three Dimensional Ion Implantation System. (1998). Journal of the Institute of Electrical Engineers of Japan, 118(12), 744–747. https://doi.org/10.1541/ieejjournal.118.744

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