Threshold-Voltage Extraction Methods for Atomically Deposited Disordered ZnO Thin-Film Transistors

Abstract

In this paper, we present a threshold-voltage extraction method for zinc oxide (ZnO) thin-film transistors (TFTs). Bottom-gate atomic-layer-deposited ZnO TFTs exhibit typical n-type enhancement-mode transfer characteristics but a gate-voltage-dependent, unreliable threshold voltage. We posit that this obscure threshold voltage is attributed to the localized trap states of ZnO TFTs, of which the field-effect mobility can be expressed as a gate-bias-dependent power law. Hence, we derived the current–voltage relationship by dividing the drain current with the transconductance to rule out the gate-bias-dependent factors and successfully extract the reliable threshold voltage. Furthermore, we investigated the temperature-dependent characteristics of the ZnO TFTs to validate that the observed threshold voltage was genuine. Notably, the required activation energies from the low-temperature measurements displayed an abrupt decrease at the threshold voltage, which was attributed to the conduction route change from diffusion to drift. Thus, we conclude that the reliable threshold voltage of accumulation-mode ZnO TFTs can be determined using a gate-bias-dependent factor-removed current–voltage relationship with a low-temperature analysis.