Validity of Electron Temperature Measurement by Using Boltzmann Plot Method in Radio Frequency Inductive Discharge in the Atmospheric Pressure Range

Abstract

The validity of electron temperature measurement using the Boltzmann plot method was investigated in a radio frequency (rf) inductive discharge in the atmospheric pressure range. Since the Boltzmann plot method requires local thermal equilibrium (LTE), the parameter regions of electron temperature and electron density, in which the Boltzmann plot method is applicable, were analyzed in terms of a comparison of the spontaneous emission and collisional excitation to the excited states. It is observed that in our rf-inductive plasma near the atmospheric pressure range the Boltzmann plot method does not provide an exact measurement of electron tem- perature because of relatively low electron density, which does not satisfy the calculation criteria. An alternative method employing a combination of the Stark broadening measurement and the Saha-Boltzmann equation was demonstrated to more accurately determine the plasma parameters (electron temperature and electron density).