Development of high-performance, high-volume consumer mems gyroscopes

Abstract

This paper discusses the challenges and success factors for creating the world’s first integrated MEMS gyroscopes for the consumer electronics market. A disruptive MEMS processing platform called Nasiri-Fabrication is described which has enabled Motion Processing applications, creating the largest and fastest growing MEMS sensors market segment. The paper also presents the design challenges and methodology behind the creation of the world’s smallest and best performing consumer grade gyroscope.