Copper (I) oxide rf-magnetron sputtering at elevated substrate temperatures

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Abstract

The structural and optical properties of Cu2O thin films grown by magnetron sputtering under elevated substrate temperatures were investigated. All samples show clear XRD patterns and photoconductivity response. An influence of Ar/O2 ratio and sputtering power on Cu2O structural properties was demonstrated. A ZnO/Cu2O-based solar cell was grown by magnetron sputtering at a temperature of 450 °C. An open circuit voltage of the solar cell is 80 mV.

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Kudryashov, D., Monastyrenko, A., Mozharov, A., Bukatin, A., Nikitina, E., Pirogov, E., & Gudovskikh, A. (2017). Copper (I) oxide rf-magnetron sputtering at elevated substrate temperatures. In Journal of Physics: Conference Series (Vol. 917). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/917/3/032020

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