Surface science in sub-seconds by a combination of grazing incidence geometry and QEXAFS

Abstract

The feasibility of time resolved in-situ investigations of surfaces and thin film growth phenomena was explored by combining quick-scanning X-ray absorption spectroscopy with the grazing incidence geometry. Using a dedicated monochromator and an X-ray reflectometer, a time resolution of about 50 ms for a single spectrum is feasible. In-situ investigations performed during the sputter deposition of thin copper films demonstrate the capabilities of this approach. © Published under licence by IOP Publishing Ltd.