Characterization of ultrathin insb nanocrystals film deposited on SiO2/Si substrate

Abstract

Recently, solid-phase recrystallization of ultrathin indium antimonide nanocrystals (InSb NCs) films grown on SiO 2/Si substrate is very attractive, because of the rapid development of thermal annealing technique. In this study, the recrystallization behavior of 35 nm indium antimonide film was studied. Through X-ray diffraction (XRD) analysis, it is demonstrated that the InSb film is composed of nanocrystals after high temperature rapid thermal annealing. Scanning electron microscopy shows that the film has a smooth surface and is composed of tightly packed spherical grains, the average grain size is about 12.3 nm according to XRD results. The optical bandgap of the InSb NCs film analyzed by Fourier Transform infrared spectroscopy measurement is around 0.26 eV. According to the current-voltage characteristics of the InSb NCs/SiO 2/p-Si heterojunction, the film has the rectifying behavior and the turn-on voltage value is near 1 V. © 2011 Dengyue et al.