Generations and applications of atmospheric pressure glow discharge by integration of microplasmas

Abstract

Integration of microplasmas enables us to obtain atmospheric pressure discharges with good macroscopic uniformity and various functions. We demonstrate two specific electrodes of microplasmas for generations of dielectric barrier discharges at atmospheric pressure, and integrated microplasmas on large two-dimensional area are sustained with electron density more than 1012cm-3. Especially "fabric" type electrode has a promising structure to provide various flexible discharge space and plasma processing on winding surface. Integrated microplasmas in array structure will serve as electromagnetic-wave control devices as well as processing tools, and two aspects are discussed in terms of equivalent dielectrics and metals. © 2007 IOP Publishing Ltd.