Modeling of Kr-Xe discharge of excimer lamp

Abstract

This paper reports the numerical simulation of Dielectric Barrier Discharge (DBD) for Kr-Xe excilamp. The model of the discharge consists of three main modules: a plasma chemistry module, a circuit module and a Boltzmann equation module. The results predict the optimal operating conditions and describe the electrical and chemical properties of the KrXe* excimer lamp. © 2013 Owned by the authors, published by EDP Sciences.