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Optical lithography with and without NGL for single-digit nanometer nodes

  • Lin B
Optical Microlithography XXVIII (2015) 9426 942602
DOI: 10.1117/12.2087008
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Lin, B. J. (2015). Optical lithography with and without NGL for single-digit nanometer nodes. In Optical Microlithography XXVIII (Vol. 9426, p. 942602). SPIE. https://doi.org/10.1117/12.2087008

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