Modeling and performance analysis of MEMS based sensor used for monitoring process chambers in semiconductor manufacturing

Abstract

At present mems based totally included fuel sensors have numerous advantages which includes ease of array fabrication, small length and specific thermal manipulation capabilities and exact analysis were conducted to take a look at the resonance modes of various sensor configurations which includes fixed-stop association and spring board association fashions have been constructed based totally at the formatted masks format technique sequences and layer thickness. Thermo-electro mechanical simulations had been additionally performed for this device. During those simulations evaluation of frequency degrees, displacement. In this paper exact analysis of frequency levels and displacement levels are calculated with the aid of designing and modeling of MEMS fuel sensor in MEMS Simulation Tool.