Characterisation of the influence function non-additivities for a 1024-actuator MEMS deformable mirror

Abstract

In order to evaluate the potential of MEMS deformable mirrors for open-loop applications, a complete calibration process was performed on a 1024-actuator mirror. The mirror must be perfectly calibrated to obtain deterministic membrane deflection. The actuator's stroke-voltage relationship and the effect of the non-additivity of the influence functions are studied and finally integrated in an open-loop control process. This experiment aimed at minimizing the residual error obtained in open-loop control.