Ultra-high-resolution quanta image sensor with reliable photon-number-resolving and high dynamic range capabilities

Abstract

Superior low-light and high dynamic range (HDR) imaging performance with ultra-high pixel resolution are widely sought after in the imaging world. The quanta image sensor (QIS) concept was proposed in 2005 as the next paradigm in solid-state image sensors after charge coupled devices (CCD) and complementary metal oxide semiconductor (CMOS) active pixel sensors. This next-generation image sensor would contain hundreds of millions to billions of small pixels with photon-number-resolving and HDR capabilities, providing superior imaging performance over CCD and conventional CMOS sensors. In this article, we present a 163 megapixel QIS that enables both reliable photon-number-resolving and high dynamic range imaging in a single device. This is the highest pixel resolution ever reported among low-noise image sensors with photon-number-resolving capability. This QIS was fabricated with a standard, state-of-the-art CMOS process with 2-layer wafer stacking and backside illumination. Reliable photon-number-resolving is demonstrated with an average read noise of 0.35 e- rms at room temperature operation, enabling industry leading low-light imaging performance. Additionally, a dynamic range of 95 dB is realized due to the extremely low noise floor and an extended full-well capacity of 20k e-. The design, operating principles, experimental results, and imaging performance of this QIS device are discussed.