Deposition of a high entropy thin film by aerosol-assisted chemical vapor deposition

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Abstract

Herein we report for the first time the synthesis of a high entropy (CuZnCoInGa)S metal sulfide thin film deposited by AACVD using molecular precursors.

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Xiao, W., Buckingham, M. A., Li, Y., Hazeldine, K., Han, B., Cartmell, S. H., … Lewis, D. J. (2023). Deposition of a high entropy thin film by aerosol-assisted chemical vapor deposition. Chemical Communications, 59(83), 12427–12430. https://doi.org/10.1039/d3cc03205a

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