Precision position control of pneumatic servo table embedded with aerostatic bearing

Abstract

This paper is to build a pneumatic servo table by combining the air cylinder embedded with aerostatic bearing. The compressed air flows to the small gap between the bearing and the sliding guide, and the cylinder can thus float around the air film and on the guide surface of the table. Due to the air film between the bearing and the sliding guide, the relative motion is almost free of friction. The aerostatic bearing, which is used non-contact characteristic of aerostatic bearing in its application, expect to overcome the stick-slip phenomenon and improve the stability of the precision positioning. The friction forces of the pneumatic servo table are measured, and plot the relation figure of factional force and speed. The hybrid self-tuning fuzzy controller with the compensators of buffer and dead-zone are proposed in this paper. From the experimental results, in case of different position, the positioning accuracy can reach within the 0.04μm, and system has highly stability.