A modified molecular beam instrument for the imaging of radicals interacting with surfaces during plasma processing

Abstract

A new instrument employing molecular beam techniques and laser induced fluorescence (LIF) for measuring the reactivity of gas phase radicals at the surface of a depositing film has been designed and characterized. The instrument uses an inductively coupled plasma source to create a molecular beam containing essentially all plasma species. A tunable excimer pumped dye laser is used to excite a single species in this complex molecular beam. LIF signals are imaged onto a gated, intensified charge coupled device (ICCD) to provide spatial resolution. ICCD images depict the fluorescence from molecules both in the molecular beam and scattering from the surface of a depositing film. Data collected with and without a substrate in the path of the molecular beam provide information about the surface reactivity of the species of interest. Here, we report the first measurements using the third generation imaging of radicals interacting with surfaces apparatus. We have measured the surface reactivity of SiH molecules formed in a 100% SiH4 plasma during deposition of an amorphous hydrogenated silicon film. On a 300 K Si (100) substrate, the reactivity of SiH is near unity. The substrate temperature dependence (300-673 K) of the reactivity is also reported. In addition, reactivity measurements for OH molecules formed in a water plasma are presented. In contrast to the SiH molecule, the reactivity of OH radicals is 0.55±0.05 on the surface of a Si (100) substrate. © 1997 American Institute of Physics.