A MEMS fabricated flexible electrode array for recording surface field potentials

Abstract

We developed a method to microfabricate flexible electrode arrays on a thin Kapton substrate, which was engineered to minimize trauma when inserted between the dura and skull to obtain surface EEG recordings. The array consisted of 64 gold electrodes, each 150 μm in diameter on a 750 μm spaced 8 × 8 grid. Using photolithographic procedures, any arrangement of electrodes can be implemented. We used the electrode array to record evoked response signals to create topographical maps of the whisker barrels on the cortical surface with excellent signal stability over a period of 8 h. The materials used for this fabrication are potentially biologically inert and, with some additional modifications to the design, can be chronically implanted with minimal side effects. Retinal prosthesis, human neurosurgery, and neurological research are all limited to some degree by the resolution and biological compatibility of the implants used. This type of array could greatly enhance the spatial resolution, signal quality, and stability of implantable surface electrode arrays. © 2005 Elsevier B.V. All rights reserved.