We present the design, fabrication and characterization of high quality factor silicon nitride nanobeam PhC cavities at visible wavelengths for coupling to diamond color centers in a cavity QED system. We demonstrate devices with a quality factor of ∼24, 000 (±250) around the zero-phonon line of the germanium-vacancy center in diamond. We also present an efficient fiber-to-waveguide coupling platform for suspended nanophotonics. By gently changing the corresponding effective indices at the fiber-waveguide interface, we achieve a coupling efficiency of ∼96% (±2%) at the cavity resonance.
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Alajlan, A., Khurana, M., Liu, X., Cojocaru, I., & Akimov, A. V. (2020). Free-standing silicon nitride nanobeams with an efficient fiber-chip interface for cavity QED. Optical Materials Express, 10(12), 3192. https://doi.org/10.1364/ome.411219