Simulation of curl compensation in MEMS micromirror

Abstract

This paper reports a design to compensate overlapping area reduction in MEMS Micromirror. The electromechanical behavior of a 300x300 m mirror actuated by electrostatic comb drive is simulated by CoventorWare. The interdigitated fingers are 240 νm long and 20 νm wide separated by 20 νm gap. The displacement of the mirror is compared when the frame of stator is released and fixed. The simulation shows that released-frame stator produces more displacement in z direction than fixed-frame stator by the factor of 3 when 50V DC voltage is applied. The improvement in micromirror actuation is as a result of the increase of overlapping area provided by curl compensation with released-frame approach. Therefore, the released-frame design is a promising method to reduce input voltage and enhance efficiency of electrostatic comb drive micromirror. © 2006 IOP Publishing Ltd.