Fabrication and analysis of awl-shaped serpentine microsprings for large out-of-plane displacement

Abstract

This work investigates a novel awl-shaped serpentine microspring for a suspension structure, with a lower spring constant under the same unit layout area in out-of-plane motion. Using Castigliano's theorem, the spring constant of the microspring was theoretically derived and simulations were performed using COMSOL Multiphysics to verify the theoretical results. The proposed awl-shaped serpentine microspring was successfully fabricated using silicon-based micromachining. Experiments were conducted to compare the theoretical and numerical results, which were in close agreement. In addition, a parameter of spring constant to layout area ratio (K/A) is defined to be used as the index for comparing spring constants under the same unit area. Accordingly, the awl-shaped serpentine microspring has a lower K/A value than the traditional serpentine microspring with the same total effective length and folds. With a greater taper angle, more folds, a smaller beam width, and lower beam thickness, the awl-shaped serpentine microspring has a smaller K/A value. Using the proposed mathematical model, the spring constants of microsprings of various sizes and geometric structures can be calculated in out-of-plane motion before the microstructure is fabricated. Thus, it saves time when designing a microspring with a proper spring constant.