Fabrication of Two-Dimensional Microstructures by Using Micro-Anode-Guided Electroplating with Real-Time Image Processing

Abstract

The purpose of this research was to develop a new micro-anode-guided electroplating (MAGE) system equipped by an image-guided positioning controller, to fabricate two-dimensional microstructures. From real-time image, the relative positions of the micro-anode and the microstructures tip can be located and maintained. When the relative position is adjusted, the deposition direction of the microstructures can be controllable and microstructures with different geometries can be fabricated. © The Author(s) 2014.