2D rigorous coupled wave analysis with adaptive spatial resolution for a multilayer periodic structure

Abstract

We utilize the 2D modal solution of rigorous coupled wave analysis with adaptive spatial resolution to enhance the reliability of standard RCWA for multilayer gratings with metal-dielectric structures. The conversion relation in modal solutions between the Cartesian system and the transformed system is for the first time established. Based on the proposed conversion relation, the modal solution of the metal-dielectric structure obtained in the transformed system can match the boundary conditions with modal solutions of other different grating layers in the Cartesian system. Numerical results show that even for metal patches in microwave band, the above method can still achieve good convergence and is perfectly suitable for multi-layer structure calculation.