Analysis of a discrete-layout bimorph disk elements piezoelectric deformable mirror

Abstract

© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE). We introduce a discrete-layout bimorph disk elements piezoelectric deformable mirror (DBDEPDM), driven by the circular flexural-mode piezoelectric actuators. We formulated an electromechanical model for analyzing the performance of the new deformable mirror. As a numerical example, a 21-actuators DBDEPDM with an aperture of 165 mm was modeled. The presented results demonstrate that the DBDEPDM has a stroke larger than 10 μm and the resonance frequency is 4.456 kHz. Compared with the conventional piezoelectric deformable mirrors, the DBDEPDM has a larger stroke, higher resonance frequency, and provides higher spatial resolution due to the circular shape of its actuators. Moreover, numerical simulations of influence functions on the model are provided.