Simulation and optimization of geometrical structure of one-port SAW resonator using FEM

Abstract

In this article a one-port surface acoustic wave (SAW) resonator is simulated using COMSOL Multiphysics. The effect of geometrical structure of the piezoelectric substrate and interdigital transducer (IDT) on the resonance frequency is demonstrated and subsequently optimized the height and width of the electrode through simulation. The selection of depth of substrate has been done after a rigorous analysis by varying the length of depth and observing its effect over the nature of resonance frequency. Lithium Niobate has been used as substrate and Al is opted as material for the electrode. Finally one-port SAW resonator has been simulated with the optimized geometry and the mechanical deformation as well as electric potential distribution have been noted, which is very useful for the modelling of any SAW devices.