Journal Article

Ion projection sensitized selective Cu electroplating on uncoated p-Si

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures (2002) 20(6) 2713-2716
DOI: 10.1116/1.1524977
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Spiegel, A., Bruenger, W. H., Dzionk, C., & Schmuki, P. (2002). Ion projection sensitized selective Cu electroplating on uncoated p-Si. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 20(6), 2713–2716. https://doi.org/10.1116/1.1524977

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