Size-controlled Growth of Fe Nanoparticles in Gas Flow Sputtering Process

Abstract

Journal of Magnetics 11(3), 103-107 (2006) ⓒ 2006 Journal of Magnetics Size-controlled Growth of Fe Nanoparticles in Gas Flow Sputtering Process H. Sakuma*, H. Aoshima, and K. Ishii Department of Electrical and Electronic Engineering, Utsunomiya University, Utsunomiya 321-8585, Japan (Received 22 March 2006) Iron (Fe) nanoparticles with diameters of 15–50 nm were obtained by the gas flow sputtering process. The particle size varied with the discharge current and Ar gas flow rate. While the particle size increased with the discharge current at an Ar flow rate of 500 sccm, the distribution of the particle diameters splits into two peaks for an Ar flow rate of 200 sccm and low discharge current. At 200 sccm, particles of about 50 nm were obtained regardless of the discharge current; in addition, smaller particles with diameters depending on the discharge current were also obtained. The changes in the particle size are discussed in terms of Fe vapor density and growth period. Key words : gas flow sputtering, Fe nanoparticle, particle size, particle size distribution