Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

Abstract

ARTICLE HIGHLIGHTS HIGHLIGHTS • An interdigital electrode structure composed of two porous microneedle arrays greatly increases the sensitivity of the pressure sensor. • The pressure sensor has good stability over 1500 cycles due to the bilayer parylene-enhanced porous microneedle array electrode structure. • The pressure sensor can accurately monitor the movements of body parts and has a certain ability to recognize speech.