Densification of spin-on-glass (SOG) film by RF plasma treatment

Abstract

We propose a spin-on glass (SOG) film densification technique based on the plasma-treatment technology. We demonstrated the densification of the SOG film at the temperature of lower than 53 degree C without compulsory cooling. We investigate the plasma-densification condition and found that the optimum RF power needed to densify the SOG film. This technique is applicable for production processes in wide range of electronic devices. © 2011 Ceramic Society of Japan.