On-chip dispersion spectroscopy of CO2 using a mid-infrared microring resonator

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Abstract

We demonstrate on-chip molecular fingerprinting by measuring the refractive index dispersion of gas in the mid-IR using a thermally tuned suspended silicon microring resonator. We show CO2 sensing down to 1000 ppm at 4.23 µm wavelength.

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Briano, F. O., Errando-Herranz, C., & Gylfason, K. B. (2020). On-chip dispersion spectroscopy of CO2 using a mid-infrared microring resonator. In Optics InfoBase Conference Papers (Vol. Part F183-CLEO-SI 2020). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/CLEO_SI.2020.STh1N.3

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