Pressure Sensing Properties of AlN Thin Films Sputtered at Room Temperature

  • Seok H
  • Kim S
  • Kang Y
  • et al.
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Abstract

Recently, the enormous growth in personal communications systems (PCS), satellite communication and various other forms of wireless data communication has made analogue frequency control a key issu ...

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Seok, H.-W., Kim, S.-K., Kang, Y.-K., Lee, Y.-J., Hong, Y.-W., & Ju, B.-K. (2014). Pressure Sensing Properties of AlN Thin Films Sputtered at Room Temperature. Journal of Sensor Science and Technology, 23(2), 94–98. https://doi.org/10.5369/jsst.2014.23.2.94

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