A Preliminary Experimental Study of Polydimethylsiloxane (PDMS)-To-PDMS Bonding Using Oxygen Plasma Treatment Incorporating Isopropyl Alcohol

Abstract

Polydimethylsiloxane (PDMS) is a widely used material for soft lithography and microfabrication. PDMS exhibits some promising properties suitable for building microfluidic devices; however, bonding PDMS to PDMS and PDMS to other materials for multilayer structures in microfluidic devices is still challenging due to the hydrophobic nature of the surface of PDMS. This paper presents a simple yet effective method to increase the bonding strength for PDMS-to-PDMS using isopropyl alcohol (IPA). The experiment was carried out to evaluate the bonding strength for both the natural-cured and the heat-cured PDMS layer. The results show the effectiveness of our approach in terms of the improved irreversible bonding strength, up to 3.060 MPa, for the natural-cured PDMS and 1.373 MPa for the heat-cured PDMS, while the best bonding strength with the existing method in literature is 1.9 MPa. The work is preliminary because the underlying mechanism is only speculative and open for future research.