Wireless Passive Temperature Sensor Realized on Multilayer HTCC Tapes for Harsh Environment

Abstract

A wireless passive temperature sensor is designed on the basis of a resonant circuit, fabricated on multilayer high temperature cofired ceramic (HTCC) tapes, and measured with an antenna in the wireless coupling way. Alumina ceramic used as the substrate of the sensor is fabricated by lamination and sintering techniques, and the passive resonant circuit composed of a planar spiral inductor and a parallel plate capacitor is printed and formed on the substrate by screen-printing and postfiring processes. Since the permittivity of the ceramic becomes higher as temperature rises, the resonant frequency of the sensor decreases due to the increasing capacitance of the circuit. Measurements on the input impedance versus the resonant frequency of the sensor are achieved based on the principle, and discussions are made according to the exacted relative permittivity of the ceramic and quality factor (Q) of the sensor within the temperature range from 19°C (room temperature) to 900°C. The results show that the sensor demonstrates good high-temperature characteristics and wide temperature range. The average sensitivity of the sensor with good repeatability and reliability is up to 5.22 KHz/°C. It can be applied to detect high temperature in harsh environment.