Silicon on insulator optical waveguides formed by direct wafer bonding

Abstract

Planar optical waveguides were fabricated by the novel technique of direct wafer bonding. The propagation loss was determined for both TE and TM polarization, at wavelenghts of 1.15 μm and 1.523 μm. The lowest loss of 0.27 dB cm-1 was measured for a waveguide with a guiding layer of 7.1 μm using a TE polarized input beam at a wavelength of 1.523 μm. © 1992.