Abstract
This paper reports a novel method to fabricate micro structures under room temperature, which could be used in microfluidic system. This micro fluidic system can be used to automatically transport liquid by evaporation at the end without any external driving force. Because the micro fluidic system chip was easy to be fabricated, and it didn't need dynamic temperature control system and driving pump, the cost of whole system would be cheap. Moreover, silicon dioxide is easy to integrate with other system by semiconductor technology. Therefore, it is a high economic technology to be applied on commercial products. © 2007 IEEE.
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CITATION STYLE
Yao, D. J., & Chen, P. Y. (2007). Room temperature microchannel fabrication for microfluidic system. In 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings (pp. 122–125). https://doi.org/10.1109/NANO.2007.4601153
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