Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Abstract

The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.