Optical properties and microstructure rietveld analysis of CeO2-doped SrTiO3 thin film

Abstract

Cerium Oxide (CeO2)-doped Strontium Titanate (SrTiO3) thin films have been synthesized using Chemical Solution Deposition (CSD method. The doping composition of CeO2 were set to 0%, 2%, 4%, 6% weight percent. Optical and structural characterization of the thin film was conducted by using the UV-Vis spectrophotometers, and the X-Ray Diffractometer. The results show that the thickness of the SrTiO3 film produced is 1,128 to 1,540 μm, while the bandgap energy ranges from 3.28 eV to 3.45 eV. The lattice parameters produced are 3,909 Å to 3,951 Å so that the crystal structure forms a cube (α = β = γ= 90°) with a crystallite size of 869.520 Å-915.632 Å. The Rietveld analysis of XRD data using MAUD Software confirms that the increasing value of CeO2 doping composition will reduce the lattice parameters of SrTiO3 thin film.