Numerical analysis of the morphological and phase changes in the TiN/Al2O3 coating under high current electron beam modification

Abstract

A modification of the surface structure of the hybrid coating TiN/Al2O3 with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with an increase of the beam energy, the surface becomes more regular and uniform. © A.D. Pogrebnjak, V.N. Borisyuk, A.A Bagdasaryan, 2013.