Multi-axis integrated Hall magnetic sensors

Abstract

Conventional Hall magnetic sensors respond only to the magnetic field component perpendicular to the surface of the sensor die. Multi-axis sensing capability can be provided in the following two ways: (a) by integrating magnetic flux concentrators on the die, and (b) by using vertical Hall devices. Here we review the most important two-and three-axis integrated Hall magnetic sensors based on these concepts. Their applications include mapping of magnetic fields and sensing angular position.Konvencionalni magnetski senzori na bazi Holovog efekta mere samo komponentu magnetskog polja koja je upravna na povrsinu senzora. Merenje magnetskog polja duz vise osa moze da se ostvari na sledeca dva nacina: (a) integracijom koncentratora magnetskog fluksa i (b) koriscenjem vertikalnih Holovih elemenata. U ovom radu prikazujemo najvaznije Holove magnetske senzore sa dva i tri pravca osetljivosti koji baziraju na ovim konceptima. Njihove najvaznije primene su merenje magnetskih polja i beskontaktno merenje ugla.