Microanalytical Imaging with Auger Electrons

Abstract

The detection of Auger electrons in a scanning electron microscopein order to form chemically specific images of the surfaces of solidsis reviewed. The limits to sensitivity and spatial resolution aredescribed and the current "state of the art" is summarised. Someof the useful image processing tools are reviewed and then a smallset of applications of the technique when used for the study of surfacesegregation, semiconducting devices and archaelogy are described.