Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect

Van Nguyen, S., Hosadugra, S., Haigh, T., Yao, Y., Tai, L., Cohen, S., … Canaperi, D. (2017). Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect. ECS Journal of Solid State Science and Technology, 6(7), P429–P434. https://doi.org/10.1149/2.0231707jss