Abstract
The field emission arrays of SiC sharp emitter tips have been produced for the first time by use of the transfer mold technique. The test structures of active gun, containing approximately 3×104 of emitters, were prepared. The field emission current and work function calculations for SiC emitter arrays have been presented.
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CITATION STYLE
APA
Górecka-Drzazga, A., Dziuban, J., & Prociów, E. (2000). SiC field emitter arrays fabricated by transfer mold technique. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 18(2), 1115–1118. https://doi.org/10.1116/1.591341
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