Abstract
We present the first experimental demonstration of MEMS-based magnetic optics for control of charged particle beams. Combined function (steering and focusing) 4-pole electromagnets with a 600-µm bore and 55-µm yoke thickness (686-µm magnetic length) have been fabricated with a novel MEMS process. These 3D solenoidal multi-pole electromagnets have demonstrated hysteresis-free adjustable 2D steering and focusing of a pC-charge 34-keV electron beam with 24-mT field intensity, 220-T/m field gradient, and potential for pulsed operation beyond 100 kHz. Simple geometric optimizations promise a 4-fold improvement in both field intensity and gradient without further scaling.
Cite
CITATION STYLE
Harrison, J., Wu, J., Paydar, O., Hwang, Y., Threlkeld, E., Rosenzweig, J., … Candler, R. (2014). High-gradient MEMS electromagnets for particle beam manipulation. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 60–63). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2014.16
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
