Design of Lithium Niobate Mems Resonator

Abstract

This paper reports on stress and displacement of the resonator’s nodes. The search of the resonator’s frequency is examined by using Lithium niobate (LiNbO3) as the resonator’s major component material. By using the lithium niobate as a major component it makes a partial changes in stress and displacement of a resonator. The theoretical details of stress and displacement are given for respective eigen frequency. The line graph for the stress and displacement on the X and Y axis is examined by using the comsol software. The design of resonator by using the software makes easy to rectify the technical errors, before going to create a hardware product. For example the acoustic resonator’s are used to reduce the noise in the automobile industries with the use of muffler. The resonator used for reducing the noise can be designed initially with the software such that the design clarity will be noticed. This report based on resonator design using lithium niobate(LiNbO3), other then lithium niobate materials like silicon can also be used but in this project lithium niobate is used as the major component because it is prepared by using lithium(Li), niobium(Nb), oxygen(O2) which is not directly present in nature.