Development of a Nanoindenter on the Basis of an Atomic Force Microscope

Abstract

A nanoindentation hardness apparatus was developed on the basis of an atomic force microscope to obtain both an indentation curve and an indentation image. Newly devised features were to use a lever which has a three-sided pyramidal diamond tip at the central part of the lever, to measure the vertical displacement at the center of the lever and to add an actuator for controlling the force. The ultra-microhardness values of gold, SUS403 steel and SNCM439 steel measured at the indentation forces between 2.6×103 and 3.5×103μN using the nanoindentation hardness apparatus agreed with the macrohardness values measured at the force of 4.9 or 9.8 N using the conventional Vickers hardness apparatus. However, the ultra-microhardness increased with decreasing indentation force. This behavior was explained considering the elastic-plastic conditions of the specimens. © 1995, The Japan Society of Mechanical Engineers. All rights reserved.