Ignition of a Plasma Discharge Inside an Electrodeless Chamber: Methods and Characteristics

Abstract

In this paper the generation and diagnostics of a reduced pressure (300 mTorr to 3 Torr) plasma generated inside an electrodeless containment vessel/chamber are presented. The plasma is ignited by a guided ionization wave emitted by a low temperature pulsed plasma jet. The diagnostics techniques include Intensified Charge Coupled Device (ICCD) imaging, emission spectroscopy, and Langmuir probe. The reduced-pressure discharge parameters measured are the magnitude of the electric field, the plasma electron number density and temperature, and discharge expansion speed.