Systematic design of MEMS resonators for optimal nonlinear dynamic response

Abstract

We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.